An Introduction to Microelectromechanical Systems by Nadim Maluf, Kirt Williams

By Nadim Maluf, Kirt Williams

Bringing you recent with the most recent advancements in MEMS know-how, this significant revision of the best-selling An creation to Microelectromechanical structures Engineering will give you a present figuring out of this state of the art expertise. You achieve useful wisdom of MEMS fabrics, layout, and production, and find out how it truly is being utilized in business, optical, clinical and digital markets. the second one version beneficial properties fresh sections on RF MEMS, picture MEMS, micromachining on fabrics except silicon, reliability research, plus an extended reference record.

With an emphasis on commercialized items, this precise source is helping you identify even if your software can take advantage of a MEMS resolution, know the way different functions and firms have benefited from MEMS, and choose and outline a manufacturable MEMS method in your software. you find easy methods to use MEMS expertise to allow new performance, enhance functionality, and decrease measurement and price. The publication teaches you the functions and barriers of MEMS units and methods, and is helping you speak the relative advantages of MEMS for your company’s administration. From serious discussions on layout operation and procedure fabrication of units and structures, to an intensive clarification of MEMS packaging, this easy-to-understand publication sincerely explains the fundamentals of MEMS engineering, making it a useful reference in your paintings within the box.

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Additional resources for An Introduction to Microelectromechanical Systems Engineering (2nd Edition)

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17–20. Petersen, K. , “Silicon As a Mechanical Material,” Proceedings of the IEEE, Vol. 70, No. 5, May 1982, pp. 420–457. ” —Bridget Booher, journalist, on silicon If we view micromachining technology as a set of generic tools, then there is no reason to limit its use to one material. Indeed, micromachining has been demonstrated using silicon, glass, ceramics, polymers, and compound semiconductors made of group III and V elements, as well as a variety of metals including titanium and tungsten. Silicon, however, remains the material of choice for microelectromechanical systems.

1). Polyimide is a material that is most often used in the form of sheets 7 to 125 µm thick, but can also be spin-coated in films a few micrometers thick. It is sold by DuPont High Performance Films of Circleville, Ohio, under the trade name Kapton®. Polyimide is relatively inert, is a good electrical insulator, and can be exposed to a wide range of temperatures, roughly –250º to +400ºC, for at least a short time [14]. In the electronics industry, polyimide has been used as a flexible substrate for printed circuit boards and for hard disk drives.

As clock oscillators in computers and as ringers in cellular telephones). They are attractive for MEMS because they can be used as sensors as well as actuators, and they can be deposited as thin films over standard silicon substrates. 5). Adding up these individual dipoles over the entire crystal gives a net polarization and an effective electric field within the material. Crystal symmetry again plays an important role: Only a crystal that lacks a center of symmetry exhibits piezoelectric properties.

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